Logo image
微型常閉式結構及其製作方法
Patent

微型常閉式結構及其製作方法

國立清華大學, 賴威成 and 方維倫
15/10/2015

Abstract

The present invention relates to a micro normally-closed structure and method for manufacturing the same. The micro normally-closed structure is manufactured by a micro electro mechanical systems (MEMS) process and as a MEMS component and includes a base and a stationary contact point; and a flexible arm having a first end and a mobile contact point, wherein the first end is electrically connected with the base and there keeps a normally-closed electrical connection state between the mobile contact point and the stationary contact point.

Metrics

1 Record Views

Details

Logo image