Abstract
A micro gyroscope including a substrate, an oscillating body, driving electrodes, and sensing electrodes is provided. The oscillating body formed over the substrate includes many oscillating rings arranged to form a symmetrical pattern. Wherein, the geometric centers of the neighboring oscillation rings are apart π/4 radian from each other by using the geometric centers of the symmetrical pattern as a referring point. The driving electrodes disposed on the substrate are used for driving the oscillating rings to deform. Wherein, the oscillating body has a driving deformation while the oscillating rings deformed. On the other hand, the oscillating rings deform as suffering the Coriolis force. At this moment, the oscillating body has a sensing deformation. Wherein, the directions of the driving deformation and the sensing deformation are apart π/4 radian from each other. Furthermore, the sensing electrodes disposed on the substrate are used for sensing the sensing deformation of the oscillating body.