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微奈米球結構之製作方法及其應用之孔洞製作方法
Patent

微奈米球結構之製作方法及其應用之孔洞製作方法

國立交通大學, 黃冠閔, 陳彥名, 冉曉雯, 洪勝富, 孟心飛, 趙宇強 and 張哲豪
01/04/2016

Abstract

The present invention discloses a fabricating method of micro/nanospheres structure and application thereof. A micro/nanospheres solution contact with a blade which the micro/nanospheres solution fill with all gap, and the blade is used to apply the micro/nanospheres solution on a surface of a substrate, so that a plurality of micro/nanospheres are applied and attached to the surface of the substrate. The substrate is then placed into a kind of liquid and taken out from the liquid one time or several times to remove unnecessary micro/nanospheres, thus preventing interference from external forces and enabling the uniform micro/nanospheres distribution on large area. It’s capable of large coating area now known as the largest area of coating micro/nanospheres. The method mentioned above can also be used to produce thin film having micro/nano-holes, vertical type transistor or gas sensor, thus it is advantageous for use in mass production and elements of large area. The invention also contains many advantages such as low cost, high repeatability, high uniformity and simple process.

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