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微机电电容式麦克风
Patent

微机电电容式麦克风

国立清华大学, 方維倫 and 詹竣凱
29/11/2011

Abstract

The invention provides a Micro-Electro-Mechanical condenser microphone. A diaphragm of the microphone is a rigid diaphragm which is arranged on an elastic element, thus with the help of an elastic effect of the elastic element, the rigid diaphragm shifts parallel to a normal vector direction of a back plate, thus capacitance change between the rigid diaphragm and the back plate is obtained.

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