Abstract
A test method of a micro mechanical structure and a micro test structure are provided for getting mechanical properties of a film of the micro mechanical structure. First, a micro test structure is formed on a substrate of the micro mechanical structure and a test part of the micro test structure is made of the film. The test part is vibrated and the resonance frequency of the test part is measured. By geometry dimension, density, and resonance frequency of the test part, the mechanical properties of the test part can be calculated. Then the mechanical properties of the film can be obtained. Besides, the types of the micro test structure include "micro cantilever beam" and "free-free beam".