Abstract
A MEMS resonator active temperature compensation method is provided. The MEMS resonator active temperature compensation method includes: a MEMS resonator is provided, wherein a structural resistance of the MEMS resonator is varied with an environmental temperature; a structural resistance shift value is formed by a variation of the environmental temperature; an electrical circuit is provided, wherein the electrical circuit is electrically connected with the MEMS resonator for providing an adjustment mechanism to the MEMS resonator; and a compensation value is provided from the adjustment mechanism for controlling the structural resistance shift value.