The invention discloses a microwave supplying apparatus including a microwave generator, a first power divider, a second power divider, a first waveguide, and a second wave guide. The first waveguide is connected to the microwave generator and has a first output terminal and a second output terminal to divide a microwave generated by the microwave generator along a first direction. The second power divider is connected to the first output terminal and has a third output terminal and a fourth output terminal to divide the microwave along a second direction. The first waveguide and the second waveguide are connected to the third output terminal and the fourth terminal respectively and receive the microwave through the first power divider and the second power divider to respectively output the microwave fields with the approximate intensity distribution.
- 微波提供裝置以及微波電漿系統
- Microwave Supplying Apparatus And Microwave Plasma System
- 國防部軍備局中山科學研究院張存續胡起雯林柏宏黃重鈞
- 9957787722306774
- Department of Physics, College of Science, National Tsing Hua University
- Traditional Chinese
- Patent
- 15/12/2009