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微流體之網路式微通道裝置
Patent

微流體之網路式微通道裝置

曾繁根, 林光華, 曾繁根 and 林光華
10/06/2003

Abstract

The present invention discloses a network-type micro-channel device for a micro-fluid can be applied on a bio-medical detection, and comprises a plurality of matrix 3-D micro channels formed on a substrate. The 3-D micro channel structure is produced by a polymer-MEMS technique, which comprises using a photolithography technique to laminate different polymer or semiconductor materials on the substrate, particularly forming a buried hollow micro channel. The micro channel generates a fluid-driving surface tension due to dimensional factors; furthermore, the intermingled network-type structure enables the fluid to automatically fill up each to-be-tested region.

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