Abstract
The present invention relates to a microfluidic driving apparatus and a method for manufacturing the same, more particularly, to a micromachined structure for valve and pump systems. The micromachined structure comprises: a first plate having a first surface and formed with a first groove that is indented from the first surface and that is adapted to receive a liquid therein; a second plate disposed over the first plate, having a second surface that faces toward the first surface of the first plate, and formed with a second groove that is indented from the second surface and that is adapted to receive a gas therein, the second groove meandering across the first groove so as to cooperate with the first groove to format least two intersections; and an isolating member attached to and sandwiched between the first surface of the first plate and the second surface of the second plate and isolating the first groove from the second groove. The isolating member has at least two driving parts, each of which spans a respective one of the intersections, and each of which is flexible so as to be able to flex into the first groove at the respective one of the intersections when the pressure in the second groove is increased due to introduction of the gas into the second groove, thereby pushing the liquid in the first groove to move along the length of the first groove.