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微細パタ-ンの作製方法
Patent

微細パタ-ンの作製方法

シャープ株式会社SHARP CORP, 技術研究組合オングストロームテクノロジ研究機構GIJUTSU KENKYU KUMIAI ONGUSUTOROOMU TECHNOL KENKYU KIKO, モトローラ.インコーポレイテッドMOTOROLA INC, 工業技術院長AGENCY OF IND SCIENCE & TECHNOL, 果尚志, 徳本 洋志, 大野 公隆 and ラリ-.エイ.ナガハラ
09/09/1997

Abstract

PROBLEM TO BE SOLVED: To form a fine pattern by using self-organizing molecule. SOLUTION: A laminated body 1 of an epitaxial layer 11 formed of GaAs and an epitaxial layer 12 formed of Alx Ga(1-x) As is cleaved in ethanol solution wherein octadecanthiol is dissolved. Octadecanthiol 3 is selectively attracted to a (110) surface of the epitaxial layer 11 in a cleaved surface and a line of octadecanthiol molecule corresponding to a thickness of the epitaxial layer 11 is obtained by cleaning the lamination body 1 by pure ethanol. When the (100) surface of GaAs is etched and a V-groove is formed, an Alx Ga(1-x) As layer is selectively formed in the V groove and therefore it is also possible to obtain a line by attracting stearic acid derivative molecule selectively thereon.

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