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微結構動態響應之測試方法及裝置
Patent

微結構動態響應之測試方法及裝置

寰音科技股份有限公司, 賴文斌 and 方維倫
20/08/2003

Abstract

A method and an apparatus for determining the dynamic response of a microstructure by using a pulsed broad bandwidth ultrasonic transducer as a bulk acoustic wave hammer are disclosed. A piezocomposite ultrasonic transducer device formed of a piezoelectric material and a polymer material around said piezoelectric ceramic material is used to provide a pulsed bulk acoustic wave having a bandwidth of at least 20% to excite a microstructure. The microstructure is attached onto the transducer, and the pulsed bulk acoustic wave generated through the transducer in response to a pulse voltage excites the microstructure to vibrate. Meanwhile, the dynamic response of the microstructure can be monitored by a laser Doppler vibrometer, and shown by an oscilloscope.

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