Abstract
A microstructure and a detecting method of stiction thereof are provided. The microstructure is formed on a surface of a substrate. The microstructure includes a first short structure, a second short structure and a long structure. The first short structure and the second short structure have a top surface respectively. The distance between the top surface and the substrate is a predetermined distance. The long structure has a body. The body has a body bottom surface and a body top surface. When a stiction generated between the body and the surface, the distance between the body top surface and the surface is less than the predetermined distance. When a light is emitted to the microstructure and then reflect on a screen to form a plurality of light spots. Whether the stiction take places or not is detected according to the light spots.