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微鏡片定位裝置
Patent

微鏡片定位裝置

財團法人工業技術研究院, 李國賓, 潘正堂, 陳世洲, 楊賢敏 and 謝宸碩
01/03/2003

Abstract

A micro mirror positioning device includes a stationary vertical element, a stationary horizontal element and an interference eliminator. The stationary horizontal element holds micro mirrors in place during transportation for avoiding vibration and collision. The stationary vertical element accurately orientates the micro mirrors in the vertical position. The interference eliminator assures that the micro mirrors are free from the interference caused by the operating magnetic field of other micro mirrors in the micro mirror array, or external magnetic field, thereby preventing the magnetic field from interfering the overall operation of the micro mirror array.

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