Abstract
The present invention relates to an analytic system of wafer bin map and an analytic method thereof. The analytic system of wafer bin map includes a wafer bin map input module, a wafer bin map database, a degeneration module, a standardization module, a coordinate transformation module, a defect density characterization module, a test of randomness module, a similarity comparison module, and a pattern evaluation module. The wafer bin map input module provides a wafer bin map. The wafer bin map database stores a plurality of historical wafer bin maps. The degeneration module degenerates the wafer bin map to simplify the wafer bin map. The standardization module constructs a standardized wafer bin map. The coordinate transformation module transforms the coordinates of the standardized wafer bin map to produce a plurality of standardized comparison wafer bin maps. The defect density characterization module characterizes a defect density of the plurality of standardized comparison wafer bin maps to reveal a defect density distribution of the plurality of wafer bin maps and to produce a plurality of standardized feature wafer bin maps. The test of randomness module implements a test of randomness to the plurality of historical wafer bin maps and removes random patterns of the plurality of historical wafer bin maps to decrease a compared number of the plurality of historical wafer bin maps. The similarity comparison module compares the plurality of standardized feature wafer bin maps with a plurality of standardized feature wafer bin maps corresponding to the plurality of historical wafer bin maps. The pattern evaluation module evaluates a possible match between the standardized wafer bin map and the plurality of historical wafer bin maps, and produces an evaluation result arranging the plurality of historical wafer bin maps in order according to similarity, sensitivity, and specificity.