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晶圓缺角自動對齊裝置
Patent

晶圓缺角自動對齊裝置

國立清華大學, 葉維彰 and 譚詩毅
01/04/2023

Abstract

A wafer notch automated aligner includes a main body, a wafer rotation mechanism, and a wafer positioning mechanism. The main body has a wafer boat placing portion. The wafer rotation mechanism is disposed on the main body and includes a rotor, the rotor extends through the wafer boat placing portion, and an angle between an axis of the rotor and the main body is greater than 0° and smaller than 90°. The wafer positioning mechanism is disposed on the main body and includes a positioning member, the positioning member extends through the wafer boat placing portion, and an axis of the positioning member is parallel to the axis of the rotor. Such that, a plurality of wafers are arranged in a ladder shape by the inclined rotor and the inclined positioning member, so that a wafer identification of each wafer cannot be hid by another wafer in front of each wafer, and the wafer notch automated aligner can rotate the wafer, align the notches , and identify the wafer identifications.

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