Abstract
This invention provides a chip type micro nozzle, which forms micro nozzle concurrently with chip made from polymeric material with micro duct. The chip type micro nozzle with integrated duct can be used in the conventional liquid phase mass spectrometer as it can produce electrically driven jet droplet to increase stability of signal of mass spectrometer, which enables fast precise sample analysis. This invention further provides a manufacture method of a chip type micro nozzle. On the opening of the micro duct of a chip, laser (for example, excimer laser) is employed to create micro nozzle through fine processing and then concurrent formation of chip type micro nozzle with the chip and the micro nozzle is achieved. The inventive micro nozzle is applicable to mass spectrometric examination and analysis in biological, chemical and medical fields.