Abstract
The present invention is about a kind of chip type micro flow rate sensing system with high sensitivity designed and manufactured by using the technique of micro-electro-mechanical-systems (MEMS). In this invention, a set of micro resistor is integrated with the system of micro planar impinging jet and V type planar plate on the chip so as to form the flow rate sensing system of microfluid, in which the set of micro resistor is used to detect the resistance variation caused by the regularly swinging movement generated when microfluid hits on the V type planar plate by the planar impinging jet. Therefore, the swinging frequency (fF) can be obtained to calculate the flow rate of microfluid such that the interference brought by noise can be avoided and high sensitivity is achieved. Consequently, this invention can be used in precise measurement of microfluid.