Abstract
The present invention provides a chip-type micro-fluid particle 3-D focusing and detection device. The device uses a fluidic driving force and a dielectrophoretic force to enable micro particles flowing in the center of a micro channel in order to increase the accuracy of a subsequent detection. The invented chip is made by producing a micro channel for fluid flow on a substrate. The micro channel includes a sample flow channel and a sheath flow channel in order to perform a 2-D fluid focusing on the particles in the sample flow. Meanwhile, micro electrodes are formed on the micro channel to perform a 3-D particle focusing by providing a dielectrophoretic force. The present invention can be applied on measurements (such as counting, determination, speed measurement, classification, etc.) of various particles, e.g. cells, blood cells, etc.