Abstract
The present invention provides a chip-type device for counting/classifying and analyzing the micro-fluid particle and manufacturing method thereof which integrates an optical fiber structure and micro flow channel onto a chip by means of a fast and low cost processing manner for counting/classifying and analyzing the micro-fluid particle. The present invention uses a process of micro-electromechanical system to produce both micro-flow channel and optical fiber axial passage in a chip, and then, fills the optical fiber axial passage with material of high refractive coefficient, utilizing the difference between the refractive coefficient of the chip body and that of the filler, to make total reflection of the light occur at the interface between the aforementioned chip and the filler, so as to form an optical fiber structure. The inspecting light is transmitted via a set of optical fiber structure and passed through the sample flow, and the inspection of particle counting can be carried out through the absorption and scattering of the light by the micro-particles of the sample flow matching up with the variation of light intensity measured by an external photo detector. The chip of present invention further integrates a micro flow channel to make it possess the function of sheath flow, by which it can focus the fluid and to perform classification for various cell. The present invention is applicable to various particles, such as count, speed measurement, and classification of the cell and blood cell, and measurement of various bio-medical fluorescence analysis.