Abstract
一種有機電激發光二極體(Organic Light-Emitting Diode；OLED)熱蒸鍍真空裝置，係由真空腔體、抽氣裝置及試片承載裝置所構成；試片承載裝置可將欲蒸鍍之基材(如銦鍚氧化物，Indium Tin Oxide，ITO)置入真空腔體內，藉由抽氣裝置，可使真空腔體內達最佳之真空狀態而以利於蒸鍍作業者。
- Title
- 有機電激發光二極體熱蒸鍍真空裝置
- Creators - without role
- 國科會精密儀器發展中心周卓煇林哲明呂日清柯弘哲徐永裕林炳宏林進祥
- Identifiers
- 9957788079806774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Patent
- Patent
- 554940; 213046
- Date application
- 27/02/2001