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机电元件,微机电及共振元件制作和气密度测试方法
Patent

机电元件,微机电及共振元件制作和气密度测试方法

华新丽华股份有限公司, 方維倫, 林弘毅, 杨学安 and 吴名清
24/01/2006

Abstract

The invention provides a method for making electromechanical component and micro-electromechanical and resonance components and the air density testing method, where it provides a method for making the micro-electromechanical component integrating a packaging step and a testing component setting step into a making technique and including the steps: 1) making a protection cover, comprising a cavity; b) providing a base; c) arranging a plurality of micro-mechanisms on the base, where these microstructures comprise the testing components; d) erecting a lead device at the base to control the action of these microstructures; and e) packaging at vacuum environment, i.e. at vacuum environment integrating the protection cover with the base to compose the micro-electromechanical component, where the cavity is used to contain the testing components.

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