Abstract
An EUV spectroscopic polarimeter including a light receiving element, a first polarizing modulation element, a second polarizing modulation element, an energy splitting element and a light detecting and analyzing apparatus. The light receiving element is for receiving a target light. The first polarizing modulation element is rotatably connected to the light receiving element for generating a first polarized light. The second polarizing modulation element is rotatably connected to the first polarizing modulation element for generating a second polarized light. The energy splitting element receives the second polarized light so as to generate a modulated-polarization and energy-resolved light. The light detecting and analyzing apparatus receiving the polarization-modulated and energy-resolved light and retrieving the polarization information for the whole spectrum of the target light by an analyzing algorithm.