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氮化物基半导体装置以及制造其的方法
Patent

氮化物基半导体装置以及制造其的方法

英诺赛科(苏州)科技有限公司, 张啸, 刘阳, 黃敬源 and 唐军
01/03/2022

Abstract

The nitride-based semiconductor device includes a source electrode, a drain electrode, a first gate electrode, and a second gate electrode. The first gate electrode is disposed between the source electrode and the drain electrode. The first gate electrode includes a first gate bottom portion and a first gate top portion. The first gate top portion is over and wider than the first gate bottom portion. The second gate electrode is disposed over the first gate electrode and between the source electrode and the drain electrode. The second gate electrode includes a second gate bottom portion and a second gate top portion. The second gate bottom portion is in contact with the first gate bottom portion. The second gate top portion is over and wider than the second gate bottom portion.

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