摘要
一種膜成長製程設備，包括主腔體以及照光裝置。照光裝置包括光源、透光層以及凡德瓦材料層。透光層包括遠離光源的出光面。凡德瓦材料層的缺陷濃度低於10 12cm -2，且配置於透光層的出光面上。凡德瓦材料層形成為主腔體的內表面的一部分。
A film growth process equipment including a main camber and an illumination device is provided. The illumination device includes a light source, a transparent layer and a van der Waals material layer. The transparent layer includes a light-emitting surface away from the light source. The van der Waals material layer has a defect concentration lower than 10 12cm -2, and is disposed on the light-emitting surface of the transparent layer. The van der Waals material layer constructs a portion of the inner surface of the main chamber.