摘要
本发明披露一种石墨烯制备系统及方法，相异于现有技术利用单一供气循环来对工件进行各气体的输送，本发明提出了一种在沉积过程中，通过间断式重复调整输入气体的输入量，以多循环供气来有效降低石墨烯的片电阻值的方法。
The present invention discloses a graphene manufacturing system and the method thereof. In the prior arts, constant gas flows are used for the growth of graphene layers on work pieces. In contrast, the present invention makes use of multiple pulses of gas flows to grow graphene layers with low sheet resistivity.