摘要
本發明揭露一種石墨烯製備系統及方法，相異於先前技術需於工作腔內或工件上備有一金屬箔以作為碳原子的催化劑，本發明係利用一由工作腔外輸入的催化劑粒子並經由加熱以對通入工作腔的碳料進行裂解並沉積，以使石墨烯得以直接地生成於絕緣工件之表面。藉此，本發明得以一相對便宜的催化金屬溶液來做為本發明的催化粒子來源而無需利用相對昂價的銅箔，直接的減少了石墨烯的製作成本，進而解決了石墨烯製作成本過高的問題。
The present invention discloses a graphene manufacturing system and the method thereof. In the prior art, in order to grow graphene layers, a metal foil or thin film has to be prepared and disposed either on the surface or in the vicinity of the of the work piece so as to catalyze the decomposition of carbon feedstock nearby. In contrast, the present invention uses a fluid which contains catalyst metal ions as the source of catalysts and imports the catalytic particles from outside of the working chamber. The metal particles catalyze the decomposition of carbon feedstock at high temperature and cause the direct growth of graphene layers on insulator substrates. Therefore, the present invention is able to use cost-effective materials as the source of catalysts to grow graphene for practical applications.