Abstract
This invention provides a cellular micro-particle detection chip and a manufacturing method thereof, suitable for classifying and counting cells in a sample fluid. The cellular micro-particle detection chip comprises a transparent plate base, a hollow micro-channel unit formed in the base and a sensing unit installed in the micro-channel unit. The height of the micro-channel unit and the sheath flow generated are used to focus cells in the sample fluid to sequentially align and flow and a photo sensing method is used to detect the number of the cells to achieve 3D focus sample fluid cell flow without the use of electric field or magnetic field. The manufacturing method comprises using lithography and etching to fabricate a mold and casting with polymer material. The manufacturing processes is a mature technique in semiconductor industry. Therefore, the manufacturing technique can increase production yield, achieve mass production, save research and development time and reduce cost.