Logo image
自動啟閉辨識功能的晶圓刻號辨識裝置
Patent

自動啟閉辨識功能的晶圓刻號辨識裝置

國立清華大學, 葉維彰, 林元慈 and 譚詩毅
01/09/2023

Abstract

A device for recognizing wafer identification number with automatically turning on and off recognizing function includes a base, a support frame, a light source, a plurality of image capturing units, an image recognition unit and a control unit. The base includes a wafer boat placing portion and a first switch disposed on the wafer boat placing portion. The light source and the image capturing units are disposed on the support frame. The control unit is electrically connected to the first switch, the light source, the image capturing units and the image recognition unit. Such that, the device for recognizing wafer identification number with automatically turning on and off recognizing function can automatically turn on and off the light source, the image capturing units and the image recognition unit, therefore the operation is very easy and convenience.

Metrics

1 Record Views

Details

Logo image