Abstract
A manufacturing method of self-separation layer includes the steps of: forming a plurality of convex portions on a substrate; growing a main material layer on the convex portions; and separating the main material layer from the substrate.
- Title
- 自我分離層之製造方法
- Translated title
- Manufacturing Method Of Self-Separation Layer
- Creators - without role
- 國立清華大學陳政寰郭浩中傅建中
- Identifiers
- 9957787727506774
- Academic Unit
- Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Patent
- Patent
- I360236; I360236
- Date application
- 19/12/2007