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薄膜塗佈方法
Patent

薄膜塗佈方法

國立交通大學, 孟心飛, 洪勝富, 劉益倫, 林育頌, 楊弘榮, 李育慈, 冉曉雯, 施羿綸 and 黃國瑞
01/12/2014

Abstract

Disclosed is a thin film coating method, including disposing a substrate on a carrying surface of a heating board underneath a mobile scrapper such that a gap exists between the substrate and the mobile scrapper; heating the substrate by the heating board to reach a thermal balance temperature; filling an organic solution between the substrate and the mobile scraper by a multi-point unloading device for allowing the organic solution to be evenly distributed by a capillary attraction; and moving the mobile scrapper on the substrate in varied speeds to enable the organic solution to form an even thickness on the substrate, thereby achieving an even coating on the thin film.

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