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製程偏移偵測裝置與製程偏移偵測方法
Patent

製程偏移偵測裝置與製程偏移偵測方法

財團法人工業技術研究院, 許世玄, 張孟凡, 林文斌, 江培嘉, 林谷峰 and 林志和
01/11/2011

Abstract

A process variation detection apparatus and a process variation detection method are provided. The process variation detection apparatus includes a process variation detector and a compensation signal generator. The process variation detector includes a first process variation detecting device with a channel of a first conductive type, a second process variation detecting device with a channel of a second conductive type, and a current comparator. The first conductive type and the second conductive type are different. The current comparator compares current different between the first and the second process variation detecting devices, and outputs a current comparing result. The compensation signal generator connects to the process variation detector. The compensation signal generator generates a corresponding compensation signal in accordance with the current comparing result.

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