Abstract
The invention provides a fabrication method of a focus module including the following steps: providing a first wafer, the first wafer including a first surface of the first wafer, and a second surface of the first wafer; defining a position of an aperture on the first surface side of the first wafer; fabricating a first insulation layer on the second surface side of the first wafer; fabricating a conducting wire by which a second magnet is communicated with the outside on the first insulation film; fabricating a second insulation layer on the first insulation layer and a metal film; fabricating a connecting channel connecting the conducting wire to the second magnet on the second insulation layer; defining the position of the second magnet, then fabricating the second magnet; processing the aperture; providing a second wafer, the wafer including a first surface of the second wafer and a second surface of the second wafer; defining a position of a metal layer on the first surface side of the second wafer, then fabricating a first magnet; fabricating an elastic member and a lens-holding hole on the second surface side of the second wafer; fixing the lens in the lens-holding hole; fixing one end of the elastic member relative to the first wafer, and fabricating the focus module by opposite of the first and the second magnets.