Abstract
The present invention provides a manufacturing method for bi-directional vertical motion brake and applications of the same, which forms a dielectric layer and a conductor layer on a silicon on insulator substrate and performs deep silicon etching through all the conductor layer, the dielectric layer, and the substrate to form a vertically extending groove. An anisotropically-etched slot is formed in back face of the substrate. The groove delimits a floating board structure having sides along which symmetrically arranged fixed electrode structure are formed. Four corners of the floating board are each provided with a pair of mutually-perpendicular cantilevered support arm. Edges along sides of the floating board are equipped with floating comb-like electrodes. Each fixed electrode is provided with a fixed comb-like electrode that alternates with the floating comb-like electrode. By inducing a voltage difference between the floating board and the fixed electrode, the floating board is driven to move vertically upward/downward in a parallel manner. The translation of the floating board can be employed in optical applications, including optic phase modulator, frequency modulation filter, optic attenuator and optic switch.