Abstract
A two-axis element and the manufacturing method thereof are provided. The two-axis element includes a first substrate with plural electrodes, a first connecting layer located on the first substrate, an actuation layer, a second connecting layer connected to the actuation layer, and a cover. The actuation layer includes a circular part, a actuating part, a first axis and a second axis, wherein the actuation layer is connected to the first substrate via the first connecting layer, and the cover is connected to the actuation layer via the second connecting layer. A vacuum cavity is formed by assembling the first substrate, the first connecting layer, the actuation layer, the second connecting layer, and the cover. The actuating part and the first axis are contained in the vacuum cavity, and the second axis is extended to the outside of the vacuum cavity.