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非接觸式中介層檢測方法與裝置
Patent

非接觸式中介層檢測方法與裝置

國立清華大學, 錢睿宏, 徐瑞祥, 張世杰, 俞浩 and 林雪如
16/04/2015

Abstract

A device is provided for detecting intermediary layers. Deferent thermal behaviors before and after damaging intermediary layers are used. Thus, a batch of intermediary layers can be tested. The present invention does not to run function test. In addition, the intermediary layers are not contacted. The intermediary layers would not be damaged. Thus, the present invention is used for a superior and precise test before stacking the intermediary layers.

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