Abstract
A non-volatile semiconductor device, a programmable memory, a capacitor and a metal oxide semiconductor are disclosed, wherein the non - volatile semiconductor device includes a gate dielectric layer, a floating gate, a coupling gate, a source and a drain. The gate dielectric layer is formed on a semiconductor substrate. The floating gate is formed on the gate dielectric layer. The source and the drain are formed in the semiconductor substrate and are disposed at opposing sides of the floating gate. The coupling gate consists essentially of a capacitor dielectric layer and a contact plug, where the capacitor dielectric layer is formed on the floating gate, and the contact plug is formed on the capacitor dielectric layer.