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데이터 저장 구조물을 갖춘 반도체 구조물 및 그 제조 방법
Patent

데이터 저장 구조물을 갖춘 반도체 구조물 및 그 제조 방법

타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., 창 종성 (TW)CHANG TZONG SHENG, 林崇榮, 킹 야친KING YA CHIN, 시아오 완윈HSIAO WOAN YUN and 천 황쿠에이CHEN HUANG KUI
23/08/2016

Abstract

Provided are a semiconductor structure and a method of forming the same. The semiconductor structure includes a substrate and a gate structure formed over the substrate. The semiconductor structure further includes a first source/drain structure and a second source/drain structure formed in the substrate adjacent to the gate structure. The semiconductor structure further includes an interlayer dielectric layer formed over the substrate to cover the gate structure, the first source/drain structure, and the second source/drain structure. The semiconductor structure further includes a first conductive structure formed in the interlayer dielectric layer over the first source/drain structure. The semiconductor structure further includes a second conductive structure formed in the interlayer dielectric layer over the second source/drain structure. In addition, the first conductive structure is in direct contact with the first source/drain structure, and the second conductive structure is not in direct contact with the second source/drain structure.

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