Deposition Process and Properties for ZrN on Si(100) Substrate with Pre-existed Zr Interlayer

Technical documentation

J.-H. Huang and Yu-Chen Li

Final report to the National Science Council ROC Final report to the National Science Council ROC

2007

Abstract

Deposition Process;Properties;ZrN;Si(100) Substrate;Pre-existed Zr Interlayer

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Title: Deposition Process and Properties for ZrN on Si(100) Substrate with Pre-existed Zr Interlayer
Creators - without role: J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
Yu-Chen Li
Publication Details: Final report to the National Science Council ROC Final report to the National Science Council ROC
Identifiers: 9957770701706774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Technical documentation