Effect of Bias on the Mechanical Properties and Microstructure of ZrN Thin Film

Technical documentation

Final report to the National Science Council ROC Final report to the National Science Council ROC

2002

Abstract

Bias;Mechanical Properties;Microstructure;ZrN Thin Film

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Title: Effect of Bias on the Mechanical Properties and Microstructure of ZrN Thin Film
Creators - without role: 嘉宏黃 - 國立清華大學原子科學院工程與系統科學系
Publication Details: Final report to the National Science Council ROC Final report to the National Science Council ROC
Identifiers: 9957775912906774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Technical documentation