Effect of Nitrogen Flow Rate on the Structure and Mechanical Properties of ZrN Thin Film on Si(100) and Stainless Steel Substrates

Technical documentation

J.-H. Huang and Chih-Hsin Ho

Final report to the National Science Council ROC Final report to the National Science Council ROC

2003

Abstract

Nitrogen Flow Rate;Structure;Mechanical Properties;ZrN Thin Film;Si(100);Stainless Steel Substrates

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Title: Effect of Nitrogen Flow Rate on the Structure and Mechanical Properties of ZrN Thin Film on Si(100) and Stainless Steel Substrates
Creators - without role: J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
Chih-Hsin Ho
Identifiers: 9957775453806774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Technical documentation
Publication Details: Final report to the National Science Council ROC Final report to the National Science Council ROC