- Title
- Effect of film thickness and Ti interlayer thickness on the mechanical and corrosion resistant properties of nanocrystalline TiN thin film by unbalanced magnetron sputtering
- Creators - without role
- J.-H. Huang - 國立清華大學原子科學院工程與系統科學系Fan-Yi Ouyang
- Publication Details
- Final report to the National Science Council ROC Final report to the National Science Council ROC
- Identifiers
- 9957774553706774
- Academic Unit
- Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Technical documentation
Technical documentation
Effect of film thickness and Ti interlayer thickness on the mechanical and corrosion resistant properties of nanocrystalline TiN thin film by unbalanced magnetron sputtering
Final report to the National Science Council ROC Final report to the National Science Council ROC
2005
Related links
Metrics
1 Record Views