Optimization of the Deposition Process of TiN Thin Films Using Design of Experiment Method

Technical documentation

Final report to the National Science Council ROC Final report to the National Science Council ROC

2002

Abstract

Optimization;Deposition Process;TiN Thin Films;Design;Experiment Method

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Title: Optimization of the Deposition Process of TiN Thin Films Using Design of Experiment Method
Creators - without role: 嘉宏黃 - 國立清華大學原子科學院工程與系統科學系
Identifiers: 9957776962306774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Technical documentation
Publication Details: Final report to the National Science Council ROC Final report to the National Science Council ROC