Study of processing and properties of nanocrystalline TiN thin film produced by unbalanced magnetron sputtering

Technical documentation

Final report to the National Science Council ROC Final report to the National Science Council ROC

2004

Abstract

processing;properties;nanocrystalline TiN thin film;unbalanced magnetron sputtering

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Title: Study of processing and properties of nanocrystalline TiN thin film produced by unbalanced magnetron sputtering
Creators - without role: J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
Fan-Yi Ouyang
Publication Details: Final report to the National Science Council ROC Final report to the National Science Council ROC
Identifiers: 9957774016106774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Technical documentation