- Title
- The Effect of Controlling Film Thickness and Incident Ion Direction on the Structure and Properties of TiN Thin Film Grown by Ion Plating
- Creators - without role
- 嘉宏 黃 - 國立清華大學原子科學院工程與系統科學系
- Publication Details
- Final report to the National Science Council ROC Final report to the National Science Council ROC
- Identifiers
- 9957775657306774
- Academic Unit
- Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Technical documentation
Technical documentation
The Effect of Controlling Film Thickness and Incident Ion Direction on the Structure and Properties of TiN Thin Film Grown by Ion Plating
Final report to the National Science Council ROC Final report to the National Science Council ROC
2000
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