- Title
- Using Experimental Design Method to Study the Effect of Processing Parameters on the Properties of ZrN Thin Film
- Creators - without role
- 嘉宏 黃 - 國立清華大學原子科學院工程與系統科學系
- Publication Details
- Final report to the National Science Council ROC Final report to the National Science Council ROC
- Identifiers
- 9957767241206774
- Academic Unit
- Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Technical documentation
Technical documentation
Using Experimental Design Method to Study the Effect of Processing Parameters on the Properties of ZrN Thin Film
Final report to the National Science Council ROC Final report to the National Science Council ROC
2001
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